| 摘要 |
PROBLEM TO BE SOLVED: To provide a feeding device for semiconductor chips which can use an inexpensive low-resolution camera as a camera for taking an image of a semiconductor chip attracted to a suction collet of a movable head and a reference mark.SOLUTION: A feeding device for semiconductor chips comprises a movable head 1, which comprises a suction collet 5 for attracting a semiconductor 6 and conveys a semiconductor chip 6 by driving means 4 to feed the semiconductor chip 6 to a wiring board 7 of a transfer destination; and a camera 9 for taking an image of the semiconductor chip 6 attracted to the suction collet 5 and a reference mark 16. The reference mark 16 is provided on the suction collet 5, not on the movable head 1, and a control unit 14 calculates a positional error of the semiconductor chip 6 on the basis of each position of the semiconductor chip 6 and the reference mark 16 imaged by the camera 9. The control unit 14 corrects the positional error when controlling the driving means 4 to feed the semiconductor chip 6 to the wiring board 7. |
