发明名称 CHUCK TABLE MECHANISM OF CUTTING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a chuck table mechanism of a cutting device which inhibits vibrations of a work-piece during cutting and the cost increase.SOLUTION: A chuck table mechanism 20 holds a work-piece of a cutting device 1 which cuts the work-piece with a cutting blade 31. The chuck table mechanism 20 includes: a chuck table 21 having a holding surface where the work-piece is held on the front surface side; a support base 22 which supports the chuck table 21; and weight parts 23 which are attached to the rear surface side of the chuck table 21 and a periphery of the holding surface and inhibit the vibrations of the chuck table 21.
申请公布号 JP2014011267(A) 申请公布日期 2014.01.20
申请号 JP20120145955 申请日期 2012.06.28
申请人 DISCO ABRASIVE SYST LTD 发明人 KAWAKAMI GOJI;KUSUBE KOJI;KANEKO MASANOBU
分类号 H01L21/301 主分类号 H01L21/301
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