发明名称 PROCESSING DEVICE
摘要 <p>PURPOSE:To prevent water marks from being generated, by forming a steam atmosphere in a carriage path through which a material to be processed is carried between a washing processor and a drying processor. CONSTITUTION:A steam supplying tube 9 connected with a steam generator is linked with a carrying chamber 7 following a washing chamber 4 so that an atmosphere of saturated steam 10 is always formed inside this carrying chamber 7. The inner bottom part of the carrying chamber 7 is equipped with a drain port 11 through which liquefied steam 10a can be drained. A passage 15 for clean air 14 is installed on the outside of a carrying window 12a of the carrying chamber 7 and the clean air 14 is made to pass in a streamline flow through this passage 15 so that the atmospheres inside/outside the carrying chamber 7 are interrupted to each other. Hence, an outside polluted atmosphere can be prevented from invading into the inside of the carrying chamber 7 through the carrying window 12 so that water marks can be prevented from being generated on the surface of the matter to be processed.</p>
申请公布号 JPS6352415(A) 申请公布日期 1988.03.05
申请号 JP19860195484 申请日期 1986.08.22
申请人 HITACHI TOKYO ELECTRON CO LTD;HITACHI LTD 发明人 MIZOGAMI KAZUAKI
分类号 H01L21/304;B08B3/08;H01L21/677;H01L21/68 主分类号 H01L21/304
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