| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of an electrostatic chuck by which particles can be reduced, which are generated when making an adsorbed body adsorbed in a semiconductor manufacturing process.SOLUTION: A manufacturing method of an electrostatic chuck formed with alumina and holding an adsorbed body in a semiconductor manufacturing process includes the steps of: holding an electrode 5 and a joining material 7 between two alumina plates 6 and 8, and performing heating treatment at 1400°C or more; and reducing the temperature at a rate of 100°C/h or less after the heating treatment. Since the temperature is reduced at the rate of 100°C/h or less, stress remaining in a grain boundary can be reduced, and particles can be reduced, which are generated when making an adsorbed body adsorbed in a semiconductor manufacturing process. |
