| 摘要 |
PROBLEM TO BE SOLVED: To improve the sensitivity of a sensor element.SOLUTION: A sensor element 10 for detecting particles in gas includes: an insulating substrate 2; a particle-like substance detecting section 1 constituted of a plurality of detection electrodes 11; and a creeping discharge type ozone generating section 3 constituted of a first electrode 31 and a second electrode 32 embedded in the neighborhood of the particle-like substance detecting section 1 of the insulating substrate 2, and configured to generate creeping discharge on the top face of the insulating substrate 2 according as a voltage is applied between the first electrode 31 and the second electrode 32, and to generate ozone for removing a particle-like substance from between the detection electrodes 11. Thus, when the particle-like substance is deposited, it can be removed. |
