发明名称 |
CONDUCTIVE POLYMER COMPOSITION, COATED ARTICLE PROVIDED WITH ANTISTATIC FILM OBTAINED FROM THE COMPOSITION, AND PATTERN FORMING METHOD USING THE COMPOSITION |
摘要 |
PROBLEM TO BE SOLVED: To provide a conductive polymer composition having an excellent antistatic ability and coating property, giving no adverse influences on a resist and suitable to be used for lithography using an electron beam or the like.SOLUTION: The conductive polymer composition comprises a &pgr;-conjugate conductive polymer, a polyanion and a gemini surfactant. |
申请公布号 |
JP2014009342(A) |
申请公布日期 |
2014.01.20 |
申请号 |
JP20120148936 |
申请日期 |
2012.07.02 |
申请人 |
SHIN ETSU POLYMER CO LTD;SHIN ETSU CHEM CO LTD |
发明人 |
SAWAI TOSHIYA;NAGASAWA TAKAYUKI;WATANABE SATOSHI;MASUNAGA KEIICHI |
分类号 |
C08L45/00;C08K5/16;G03F7/038;G03F7/039;G03F7/11 |
主分类号 |
C08L45/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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