发明名称 CONDUCTIVE POLYMER COMPOSITION, COATED ARTICLE PROVIDED WITH ANTISTATIC FILM OBTAINED FROM THE COMPOSITION, AND PATTERN FORMING METHOD USING THE COMPOSITION
摘要 PROBLEM TO BE SOLVED: To provide a conductive polymer composition having an excellent antistatic ability and coating property, giving no adverse influences on a resist and suitable to be used for lithography using an electron beam or the like.SOLUTION: The conductive polymer composition comprises a &pgr;-conjugate conductive polymer, a polyanion and a gemini surfactant.
申请公布号 JP2014009342(A) 申请公布日期 2014.01.20
申请号 JP20120148936 申请日期 2012.07.02
申请人 SHIN ETSU POLYMER CO LTD;SHIN ETSU CHEM CO LTD 发明人 SAWAI TOSHIYA;NAGASAWA TAKAYUKI;WATANABE SATOSHI;MASUNAGA KEIICHI
分类号 C08L45/00;C08K5/16;G03F7/038;G03F7/039;G03F7/11 主分类号 C08L45/00
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