发明名称 ORGANIC LIGHT EMITTING DISPLAY DEVICE AND THE FABRICATION METHOD THEREOF
摘要 An organic light emitting display device and a manufacturing method thereof are disclosed. The present invention includes a step of forming a first electrode on a substrate, a step of forming a pixel definition film having an opening exposing one or more parts of the first electrode, a step of performing a pre-processing process on the substrate, and a step of forming an organic film on the first electrode. The pre-processing process includes a step of processing a surface of the substrate, a step of washing the substrate, and a step of drying the substrate. An interface property between the first electrode and the organic film is improved by sequentially performing the pre-processing process including plasma surface processing, washing, and drying before an organic film deposition process. Therefore, an image stitching property can be improved. [Reference numerals] (S10) Plasma surface processing process; (S20) Substrate washing process; (S30) Substrate drying process; (S40) Deposition process
申请公布号 KR20140007683(A) 申请公布日期 2014.01.20
申请号 KR20120075140 申请日期 2012.07.10
申请人 SAMSUNG DISPLAY CO., LTD. 发明人 LEE, YOUNG HEE
分类号 H01L51/56;H05B33/10 主分类号 H01L51/56
代理机构 代理人
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