| 摘要 |
FIELD: physics.SUBSTANCE: objective lens has a housing, a drive for rotating the housing about an axis, an objective lens mounted on a stand on two bearings, and three lenses, the first of which a negative spherical fixed lens which expands a parallel laser beam entering the objective lens, a second lens and a third lens which are positive and cylindrical with mutually perpendicular edges which define dimensions of the oval laser spot focused on a substrate independent of each other. The second lens controls the value of the larger axis of the oval spot during operation and the third fixed lens defines the value of the smaller axis of the oval spot through preliminary setting of the distance from the objective lens to the substrate. The objective lens has two mini-motors. One mini-motor provides the spatial position of the larger axis of the oval laser spot at a tangent to outline of the cut component and the second mini-motor varies the length of that axis during processing by moving the second lens along the optical axis of the objective lens.EFFECT: controlling the shape of the spot of focused laser beam during operation.3 dwg |
