| 摘要 |
<p>The present invention relates to a device capable of performing a light alignment process on a plate-shaped member and performing high productivity. An irradiating unit (1) irradiates polarized light to an irradiation area (R), and a stage moving device (3) returns a first stage (21) and a second stage (22) on which a substrate (S) is mounted to the irradiation area (R). A space (L1) in which the substrate (S) on the second stage (22) passes through the irradiation area (R) is obtained between the first stage (21) located on a first position on which the substrate is located and the irradiation area (R). A space (L2) in which the substrate (S) on the first stage (21) passes through the irradiation area is obtained between the irradiation area (R) and the second stage (22) located on a second position on which the substrate is mounted.</p> |
