发明名称 GAS EXCHANGING APPARATUS
摘要 The present invention relates to a gas exchanging apparatus capable of improving the productivity of a semiconductor product and reducing experiment time. When a gas exchanging process is performed, the inner pressure of a sealing container is always monitored and a throttle valve for controlling the amount of gas purged is controlled or the amount of the wind generated from a forced draught fan is controlled to perform the gas exchanging process under a process pressure required by a user. When replacing a specific gas for forming a gas atmosphere in a glove box for an experiment or the sealing container for manufacturing a semiconductor or an OLED, the specific gas can be quickly and stably exchanged. [Reference numerals] (10) Sealing container
申请公布号 KR101352466(B1) 申请公布日期 2014.01.17
申请号 KR20130078599 申请日期 2013.07.04
申请人 KANG, HYO WON 发明人 KANG, HYO WON;KIM, HYOUNG IN;HONG, JIN SIOK;KO, DAE SUK;PARK, SEONG HOON
分类号 H01L21/02 主分类号 H01L21/02
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