发明名称 |
IMPRINT DEVICE, HOUSING CASE, AND METHOD FOR MANUFACTURING ARTICLE |
摘要 |
PROBLEM TO BE SOLVED: To provide an imprint device advantageous in achieving both mold cleaning and suppression in deterioration of throughput.SOLUTION: In an imprint device, a resin is cured while the resin on a substrate and a mold having a pattern formed therein are brought into contact with each other, and thereby the pattern is transferred to the substrate. The imprint device includes: a storing part storing a plurality of molds used for the transfer of the pattern; and a cleaning part cleaning the molds while the molds are stored in the storing part. |
申请公布号 |
JP2014007260(A) |
申请公布日期 |
2014.01.16 |
申请号 |
JP20120141461 |
申请日期 |
2012.06.22 |
申请人 |
CANON INC |
发明人 |
ARAI TAKESHI |
分类号 |
H01L21/027;B29C59/02;G03F1/82;G03F7/20 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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