发明名称 IMPRINT DEVICE, HOUSING CASE, AND METHOD FOR MANUFACTURING ARTICLE
摘要 PROBLEM TO BE SOLVED: To provide an imprint device advantageous in achieving both mold cleaning and suppression in deterioration of throughput.SOLUTION: In an imprint device, a resin is cured while the resin on a substrate and a mold having a pattern formed therein are brought into contact with each other, and thereby the pattern is transferred to the substrate. The imprint device includes: a storing part storing a plurality of molds used for the transfer of the pattern; and a cleaning part cleaning the molds while the molds are stored in the storing part.
申请公布号 JP2014007260(A) 申请公布日期 2014.01.16
申请号 JP20120141461 申请日期 2012.06.22
申请人 CANON INC 发明人 ARAI TAKESHI
分类号 H01L21/027;B29C59/02;G03F1/82;G03F7/20 主分类号 H01L21/027
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