| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a vertical structure light-emitting element with less thermal damage.SOLUTION: A method for manufacturing a plurality of vertical structure light-emitting elements by dicing a lamination part including a light-emitting layer formed on a sapphire substrate includes: a lamination part division step of dividing a lamination part on the sapphire substrate along an individual element formation region; a lift off step of lifting the divided lamination part off the sapphire substrate by arranging the divided lamination part on a surface of the silicon substrate; a mask arrangement step of arranging a mask in a region corresponding to each element formation region on a rear surface of the silicon substrate; and a light-emitting element formation step of forming a plurality of diced vertical structure light-emitting elements by dividing the silicon substrate in which each lamination part is arranged by plasma-etching the rear surface of the silicon substrate. |
