发明名称 |
DEPOSITION SYSTEM WITH ELECTRICALLY ISOLATED PALLET AND ANODE ASSEMBLIES |
摘要 |
A system for substrate deposition is disclosed. The system includes a wafer pallet and an anode. The wafer pallet has a bottom and a top. The top of the wafer pallet is configured to hold a substrate wafer. The anode has a substantially fixed position relative to the wafer pallet and is configured to move with the wafer pallet through the deposition chamber. The anode is electrically isolated from the substrate wafer. |
申请公布号 |
US2014014499(A1) |
申请公布日期 |
2014.01.16 |
申请号 |
US201314023211 |
申请日期 |
2013.09.10 |
申请人 |
COUSINS PETER JOHN;LUAN HSIN-CHIAO;PASS THOMAS;FERRER JOHN;GALLARDO REX;MEYER STEPHEN F. |
发明人 |
COUSINS PETER JOHN;LUAN HSIN-CHIAO;PASS THOMAS;FERRER JOHN;GALLARDO REX;MEYER STEPHEN F. |
分类号 |
C23C14/34 |
主分类号 |
C23C14/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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