| 摘要 |
<p>An apparatus and a method for in-tray and bottom inspection of electronic devices are disclosed. A tray loading station (11) is used to transport trays (5) to and from an inspection station (10). The inspection station has a first tray carrier unit a second tray carrier unit which are movable in the inspection station in a X-coordinate direction and in a Y-coordinate direction. at least a first (8), second (9) and third (13) buffer unit arranged between the back side of the tray loading station (11) and the inspection station (10) wherein the first (8) and the second (9) buffer are adapted to deliver trays (5) to the inspection station (10); and the third buffer (13) is adapted to transport the trays (5) from the inspection station (10) to the tray loading station (11).</p> |
