MICROMECHANICAL MEASURING ELEMENT, AND METHOD FOR PRODUCING A MICROMECHANICAL MEASURING ELEMENT

摘要

The invention relates to a micromechanical measuring element (1) which has a sensitive element (21) and a support (3). The sensitive element (21) is connected to the support (3) by means of at least one first and at least one second solder connection (41, 42), said sensitive element (21) being electrically contacted via the first solder connection (41). Furthermore, the sensitive element (21), the support (3), and the second solder connection (42) form a first chamber (51) which has a first opening (61). The invention further relates to a method for producing a micromechanical measuring element (1).