发明名称 |
MASK UNIT AND DEPOSITION DEVICE |
摘要 |
<p>A mask unit (1) is configured such that, in a planar view, the total opening lengths of apertures (S) that are not covered by a beam part (22) in the Y-direction are equal at any position in the X-direction in the apertures (S) of a deposition mask (10). The portion of the beam part (22) that is in contact with the deposition mask (10) does not span a frame unit (21) along the Y-direction, and transverses the Y-direction in a continuous or intermittent manner.</p> |
申请公布号 |
WO2014010284(A1) |
申请公布日期 |
2014.01.16 |
申请号 |
WO2013JP61201 |
申请日期 |
2013.04.15 |
申请人 |
SHARP KABUSHIKI KAISHA |
发明人 |
OCHI, TAKASHI;KAWATO, SHINICHI;OSAKI, TOMOFUMI;NIBOSHI, MANABU;KOSAKA, TOMOHIRO;TSUKAMOTO, YUTO;KIKUCHI, KATSUHIRO |
分类号 |
C23C14/04;C23C14/24;H01L51/50;H05B33/10 |
主分类号 |
C23C14/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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