发明名称 MASK UNIT AND DEPOSITION DEVICE
摘要 <p>A mask unit (1) is configured such that, in a planar view, the total opening lengths of apertures (S) that are not covered by a beam part (22) in the Y-direction are equal at any position in the X-direction in the apertures (S) of a deposition mask (10). The portion of the beam part (22) that is in contact with the deposition mask (10) does not span a frame unit (21) along the Y-direction, and transverses the Y-direction in a continuous or intermittent manner.</p>
申请公布号 WO2014010284(A1) 申请公布日期 2014.01.16
申请号 WO2013JP61201 申请日期 2013.04.15
申请人 SHARP KABUSHIKI KAISHA 发明人 OCHI, TAKASHI;KAWATO, SHINICHI;OSAKI, TOMOFUMI;NIBOSHI, MANABU;KOSAKA, TOMOHIRO;TSUKAMOTO, YUTO;KIKUCHI, KATSUHIRO
分类号 C23C14/04;C23C14/24;H01L51/50;H05B33/10 主分类号 C23C14/04
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