| 摘要 |
PROBLEM TO BE SOLVED: To excellently release a mold without damaging an imprint mold and a material to be transferred.SOLUTION: A mold release device 10 releases an imprint mold 30 from a material to be transferred 20 pressed by the imprint mold 30 to form a transfer pattern. A pattern forming method comprises: holding the material to be transferred 20 together with the imprint mold 30 to a stage 11 on a side of the material to be transferred having flexibility by a pressing plate 18, a bolt 19a and a nut 19b; fixing the imprint mold 30 to the stage 12 on a side of the imprint mold; bending the stage 11 on the side of the material to be transferred in the shape of a trough so that the material to be transferred 20 is convex toward the imprint mold 30; and relatively separating the stage 11 on the side of the material to be transferred and the stage 12 on the side of the imprint mold in a bent state to release the mold. |
