| 摘要 |
<p>A scribing device (1) is provided with: a worktable (6) on which a glass substrate (5) as a brittle material substrate on which alignment marks (M1, M2, M3...) are made on the upper surface thereof, is mounted, aligned, and secured by suction; a scribing head (2) that moves in a XY plane coordinate system and parallel to the upper surface of the glass substrate (5) above the worktable (6); a CCD camera (10) disposed beside the scribing head (2) and integratedly formed with the scribing head (2); a common X axis moving means (3) and Y axis moving means (4) that moves the scribing head (2) and CCD camera (10) as a unit in the XY plane coordinate system; an image processing device that implements imaging instructions by means of the CCD camera (10), image processing of images taken, and calculation processing; and an NC device that carries out numerical control of movement of the X axis moving means (3) and the Y axis moving means (4).</p> |
