发明名称 |
REFLECTING OPTICAL MEMBER, OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD |
摘要 |
An exit-side fly-eye mirror is provided with a first mirror block having a mirror element as one of a plurality of mirror elements, and a second mirror block having a mirror element as one of the plurality of mirror elements. The first mirror block has a connecting part that protrudes from an area other than the mirror surface of the mirror element, the connecting part providing a connection to the second mirror block. With the connecting part of the first mirror block, a plurality of mirror elements that includes the mirror element of the second mirror block is positioned relative to the mirror element of the first mirror block. |
申请公布号 |
KR20140006802(A) |
申请公布日期 |
2014.01.16 |
申请号 |
KR20137014549 |
申请日期 |
2011.11.09 |
申请人 |
NIKON CORPORATION |
发明人 |
TAKINO HIDEO;TOMOFUJI TETSUYA;KOMATSUDA HIDEKI;KASASHIMA KOHTARO |
分类号 |
G02B5/08;H01L21/027 |
主分类号 |
G02B5/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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