APPARATUS FOR MAKING THE PHOTOVOLTAIC ABSORBER LAYER

摘要

The present invention is to provide an apparatus for making a photovoltaic absorber layer for efficiently performing a selenization process using a pure Se vapor without using an expensive DESe or a harmful H2Se. According to one aspect of the present invention, the apparatus for making a photovoltaic absorber layer includes a chamber; a vaporizer and a sputtering target installed in the chamber; and a substrate holder placing the substrate outside the vaporizer and the sputtering target in the chamber and rotating the substrate to face the sputtering target and the vaporizer.