| 摘要 |
PROBLEM TO BE SOLVED: To supply a fluid at a large flow rate with a small press loss through a compact constitution.SOLUTION: There is provided a fluid control unit 10 including a valve body 11 having a valve body housing chamber 14 formed between a first branch flow passage 15 and a first communication flow passage 13, and a selector valve first control valve 20 in the valve body housing chamber 14. Further, the valve body housing chamber 14 is in a hollow inverted conic shape and the selector valve 20 is in an inverted conic shape. Furthermore, the selector valve 20 includes a seal member 22 blocking the first branch flow passage 15 and first communication flow passage 13 from each other, and the seal member 22 has an upper seal part 221 for upward sealing, a lower seal part 222 for downward sealing, and a side seal part 223 for lateral sealing. The side seal part 223 connects the upper seal part 221 and lower seal part 222 to each other, and the seal member 22 is tapered from the upper seal part 221 to the lower seal part 222. |
