| 摘要 |
The invention relates to a plasma generation device (100) comprising a plurality of plasma modules (1) for generating a plasma (6). Each plasma module (1) has a module housing (5) with at least one gas inlet (17) for supplying a process gas (18G). Furthermore, a discharge device (4, 2) for generating the plasma (6) from the process gas (18G) and a plasma outlet (3) are provided. The plasma generation device (100) has at least two plasma modules (1) for generating a plasma (6). Each plasma module has at least one gas outlet (19) for some of the process gas (18G), wherein the at least one gas outlet (19) of at least one plasma module (1) issues into a respective gas inlet (17) of another plasma module (1). |
