| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique by which, for an inertial sensor detecting acceleration and angular velocity, mechanical trouble of an acceleration sensor having a hard beam for high range detection can be diagnosed at low cost.SOLUTION: In an inertial sensor, an acceleration sensor element unit 1 has a movable part 11 that responds to applied accelerations and a diagnostic electrode 12 that displaces the movable part 11 by electrostatic force with a voltage applied from a control circuit unit. An angular sensor element unit 2 has a movable part 21 that responds to applied angular velocities and a drive electrode 22 that displaces the movable part 21 by electrostatic force with a voltage applied from a control circuit unit. The voltage signal inputted to the drive electrode 22 and the voltage signal inputted to the diagnostic electrode 12 are the same voltage signals, the voltage signal inputted to the diagnostic electrode 12 is a signal for detecting any mechanical trouble, and a carrier signal that detects the displacement of the movable part 11 has a higher frequency than that of the signal applied to the diagnostic electrode 12. |
