发明名称 OPTICAL SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide an optical semiconductor device capable of stabilizing lateral mode of oscillation light from a semiconductor laser unit and preventing deterioration in frequency characteristics, and a method for manufacturing the same.SOLUTION: A semiconductor laser unit 2 and an optical modulator unit 3 are integrated on an n-InP substrate. The optical modulator unit 3 modulates light emitted from the semiconductor laser unit 2. The semiconductor laser unit 2 includes a vertical ridge 4. The optical modulator unit 3 includes an inverse mesa ridge 5. Changing the ridge type structures of the optical modulator unit 3 and the semiconductor laser unit 2 allows for stabilization of lateral mode of oscillation light from the semiconductor laser unit 2 and prevention of deterioration in frequency characteristics.
申请公布号 JP2014007295(A) 申请公布日期 2014.01.16
申请号 JP20120142246 申请日期 2012.06.25
申请人 MITSUBISHI ELECTRIC CORP 发明人 TAKAGI KAZUHISA
分类号 H01S5/026;G02F1/017;H01S5/12;H01S5/22;H01S5/343;H01S5/50 主分类号 H01S5/026
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