发明名称 |
PHOTOSENSITIVE RESIN COMPOSITION, PHOTOSENSITIVE DRY FILM, PATTERN FORMATION METHOD, PRINTED CIRCUIT BOARD, AND METHOD FOR PRODUCING SAME |
摘要 |
This photosensitive resin composition contains: a vinyl (co)polymer (I) obtained by polymerizing a monomer mixture (alpha) containing a vinyl monomer (a) having a phenolic hydroxyl group; a vinyl copolymer (II) having a mass average molecular weight of 15,000-120,000 and obtained by polymerizing a monomer mixture (beta) containing a vinyl monomer (b) represented by CH2=CR1COO(R2O)kR3 (where R1 = hydrogen atom or methyl group; R2 = hydrocarbon group having 1-4 carbon atoms; R3 = hydrogen atom or methyl group; and k = 1 to 90) and a carboxyl-group-containing vinyl monomer (c); a photosensitive substance (III); and a compound (IV) that is a specific aromatic polyhydroxy compound. |
申请公布号 |
WO2014010473(A1) |
申请公布日期 |
2014.01.16 |
申请号 |
WO2013JP68165 |
申请日期 |
2013.07.02 |
申请人 |
MITSUBISHI RAYON CO., LTD.;MICRO PROCESS INC. |
发明人 |
UEDA AKIFUMI;NAKAGAWARA HIDETAKA;OKADA SHINTARO;FUJITA SAKI;WATANABE KAZUO;WATANABE SHIGEKI |
分类号 |
G03F7/023;C08F220/28;G03F7/004;H01L21/027;H05K3/06;H05K3/18 |
主分类号 |
G03F7/023 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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