发明名称 PHOTOSENSITIVE RESIN COMPOSITION, PHOTOSENSITIVE DRY FILM, PATTERN FORMATION METHOD, PRINTED CIRCUIT BOARD, AND METHOD FOR PRODUCING SAME
摘要 This photosensitive resin composition contains: a vinyl (co)polymer (I) obtained by polymerizing a monomer mixture (alpha) containing a vinyl monomer (a) having a phenolic hydroxyl group; a vinyl copolymer (II) having a mass average molecular weight of 15,000-120,000 and obtained by polymerizing a monomer mixture (beta) containing a vinyl monomer (b) represented by CH2=CR1COO(R2O)k­R3 (where R1 = hydrogen atom or methyl group; R2 = hydrocarbon group having 1-4 carbon atoms; R3 = hydrogen atom or methyl group; and k = 1 to 90) and a carboxyl-group-containing vinyl monomer (c); a photosensitive substance (III); and a compound (IV) that is a specific aromatic polyhydroxy compound.
申请公布号 WO2014010473(A1) 申请公布日期 2014.01.16
申请号 WO2013JP68165 申请日期 2013.07.02
申请人 MITSUBISHI RAYON CO., LTD.;MICRO PROCESS INC. 发明人 UEDA AKIFUMI;NAKAGAWARA HIDETAKA;OKADA SHINTARO;FUJITA SAKI;WATANABE KAZUO;WATANABE SHIGEKI
分类号 G03F7/023;C08F220/28;G03F7/004;H01L21/027;H05K3/06;H05K3/18 主分类号 G03F7/023
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