发明名称 PUMP MODULE AND POSITIVE DISPLACEMENT PUMP
摘要 A pump module (4, 5, 6; 4', 4'') includes a housing (14) that limits at least one channel (17) connecting at least one inlet with at least one outlet, an elastic membrane (18; 21; 22) extending in the housing in a flow direction, and a plurality of actuators located in the housing opposite each other on both sides of the at least one flow channel and forming actuation stages (A1-A6) arranged one after another in the flow direction, with a respective section of the elastic membrane being deflected and abutting a respective circumferential section of the at least one flow channel upon activation of an actuator of a respective actuation stage for forming a delivery chamber.
申请公布号 US2014017097(A1) 申请公布日期 2014.01.16
申请号 US201313928970 申请日期 2013.06.27
申请人 PFEIFFER VACUUM GMBH 发明人 CONRAD ARMIN
分类号 F04B43/04 主分类号 F04B43/04
代理机构 代理人
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