| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing an electronic device, capable of performing in-line measurement of the film thickness of a conductive film.SOLUTION: A method for manufacturing an electronic device includes the steps of: forming at least one recessed part in at least one insulation film 102; measuring a first film thickness T11 of the insulation film at the bottom face of the recessed part; forming at least one conductive film 104 in the recessed part, the conductive film having an upper face that forms a same face with the upper face of the insulation film; measuring a second film thickness T12 of the insulation film in a region other than the recessed part; and deducting the first film thickness T11 from the second film thickness T12 to calculate a film thickness T13 of the conductive film. |
