METHOD FOR MANUFACTURING LAMINATE BODY AND LAMINATE BODY

摘要

A method for manufacturing a laminate body having a titanium oxide layer mainly composed of rutile-type titanium oxide is provided, the method for manufacturing a laminate body being capable bringing the temperature during film formation and the heat-processing temperature after film formation to a relatively low temperature. The method for manufacturing a laminate body has a film formation step and a heat-processing step. The film formation step forms a precursor layer by sputtering using a titanium target containing 1 to 5 atomic% of at least one additive element selected from Ni, Fe, and Cu, on a transparent substrate at a temperature of 150°C or less. In the heat-processing step, the transparent substrate on which the precursor has been formed is heat treated at a temperature of 550 to 750°C to obtain a titanium oxide layer mainly composed of rutile-type titanium oxide.