| 摘要 |
<p>This scanning electron microscope is provided with the following: sampling units (12, 13) that sample a detection signal representing emitted electrons detected by a first detection unit (4); a processing unit (14) that computes the mean or sum of a plurality of detection signals sampled by the sampling unit; and an image-formation unit (15) that forms an image on the basis of the mean or sum of the plurality of detection signals. The period (19) of a sampling-trigger signal is determined on the basis of the mean number of electrons that a specimen is irradiated with per unit time. This allows efficient detection, with reduced droppage of emitted-electron detection signals and summing of unneeded signals, making it possible to acquire high-quality scanning electron microscope images even with a low electron irradiation level.</p> |
