| 摘要 |
PROBLEM TO BE SOLVED: To form a plurality of pressure chambers arranged two-dimensionally with high density and high accuracy.SOLUTION: A method for manufacturing a liquid discharge jet head includes a process for forming alignment marks 19 and 20 on first main surfaces 1aa and 1ba of a plurality of piezoelectric substrates 1 and 2, a process for forming an alignment mark 21 on a first main surface 1ca of a support substrate 3, and a process for sequentially positioning the plurality of piezoelectric substrates 1 and 2 to be joined to the support substrate 3. The alignment 21 is formed by patterns having the narrower pitch than that of a plurality of grooves 11 in a direction crossing longitudinal directions of grooves 11, 12 and 131 of the piezoelectric substrates 1 and 2. After a laminate is formed by joining the second main surface 1cb of the support substrate 3 to the first main surface 1ba of the piezoelectric substrate 2 in a state of an alignment mark 20 positioned relative to the alignment mark 21, the piezoelectric substrate 1 is joined to the side of the piezoelectric substrate 2 of the laminate in a positioned state of an alignment mark 19 by specifying the alignment mark 21 as a reference. |
