发明名称 PATTERNING OF MAGNETIC THIN FILM USING ENERGIZED IONS
摘要 A method for patterning a magnetic thin film on a substrate includes: providing a pattern about the magnetic thin film, with selective regions of the pattern permitting penetration of energized ions of one or more elements. Energized ions are generated with sufficient energy to penetrate selective regions and a portion of the magnetic thin film adjacent the selective regions. The substrate is placed to receive the energized ions. The portions of the magnetic thin film are rendered to exhibit a magnetic property different than selective other portions. A method for patterning a magnetic media with a magnetic thin film on both sides of the media is also disclosed.
申请公布号 US2014017518(A1) 申请公布日期 2014.01.16
申请号 US201314029248 申请日期 2013.09.17
申请人 APPLIED MATERIALS, INC. 发明人 VERHAVERBEKE STEVEN;NALAMASU OMKARAM;FOAD MAJEED A.;VENKATESAN MAHALINGAM;KRISHNA NETY M.
分类号 G11B5/84 主分类号 G11B5/84
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