发明名称 Apparatus, used to cool band-shaped substrate in vacuum, comprises cooling body having convex cooling surface as a perimeter, unit for guiding substrate such that substrate partially encircles cooling surface at contact area, and openings
摘要 <p>The apparatus comprises a cooling body (31) having a convex cooling surface (32) as a perimeter, a unit for guiding a band-shaped substrate such that the substrate partially encircles the convex cooling surface at a contact area, and openings distributed over the contact area of the cooling surface and extend through the cooling surface into a cooling body. A first subset of openings extends inside a first channel in the cooling body, which opens end face of the cooling body, and a second subset of the openings extends into a second channel within the cooling body. The apparatus comprises a cooling body (31) having a convex cooling surface (32) as a perimeter, a unit for guiding a band-shaped substrate such that the substrate partially encircles the convex cooling surface at a contact area, and openings distributed over the contact area of the cooling surface and extend through the cooling surface into a cooling body. A first subset of openings extends inside a first channel in the cooling body, which opens end face of the cooling body, a second subset of the openings extends into a second channel within the cooling body, which opens the end face of the cooling body, and a third subset of the openings extends into a third channel within the cooling body, which opens one end face of the cooling body. The first subset of openings and the third subset of the openings are arranged in a direction of movement of the substrate. The apparatus further comprises a first unit for providing a fluid such that the fluid flows through the first channel to the cooling body, and a second unit for pumping the fluid from the second channel and the third channel. The convex cooling surface is part of a fixed mold shoulder. The cooling body is designed as cylindrical cooling roll or as cylindrical cooling drum. A stationary sliding member (36) is arranged on an end face the cylindrical cooling body, is rotated about a cylindrical axis of the cylindrical cooling body, and comprises a connecting unit for supplying the fluid into the first channel, and a connecting unit for pumping the fluid from the second channel and the third channel. The sliding member further comprises a sealing element, which is firmly connected with the sliding member on a side. The sealing element comprises a sliding mechanical contact with a front end of the cooling body, and plastics. The apparatus further comprises a mechanical spring element, which presses the sliding member against the front end of the cooling body. The first, second and third channels extend from top to opposite front end of the cooling body and extend parallel to the cylinder axis of the cooling body. The cooling surface has apertures at its edge.</p>
申请公布号 DE102012013726(A1) 申请公布日期 2014.01.16
申请号 DE20121013726 申请日期 2012.07.11
申请人 FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V. 发明人 HEINS, JENS-PETER;SCHADE, FRED;LANG, PETER;KLOSE, LARS;METZNER, CHRISTOPH;WEISKE, DIETER
分类号 C23C16/52;C23C14/50;C23C14/54 主分类号 C23C16/52
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