| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanner for focusing a radiation flux on a predetermined region in a predetermined volume, capable of simply and accurately focusing a laser beam in predetermined various regions in a certain volume in a lateral direction and in a laser beam direction, and a corresponding method.SOLUTION: A scanner for focusing a radiation flux (3) on a predetermined region in a predetermined volume includes: an input optical system (6) having at least one first optical element (11), which the radiation flux (3) first enters; a focusing optical system (8) for focusing the radiation flux (3) emitted from the input optical system (6); and a deflecting mechanism (7) disposed between the first optical element (11) and the focusing optical system (8) for deflecting the radiation flux (3) having passed through the first optical element (11), in a lateral direction according to the adjusted position of a focal point. At least one optical element (11) of the input optical system (6) is movable relative to the deflecting mechanism (7) to adjust the position of the focal point of the radiation flux (3) in the direction of the radiation flux. |
