| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a vertical structure light-emitting element with less thermal damage.SOLUTION: A method for manufacturing a plurality of vertical structure light-emitting elements by dicing a lamination part including a light-emitting layer formed on a sapphire substrate includes: a silicon substrate preparation step of preparing a silicon substrate in which the lamination parts separated from the sapphire substrate and divided along an individual element formation region are arranged on a surface thereof; a mask arrangement step of arranging a mask so as to cover an exposed surface of each lamination part; and a light-emitting element formation step of forming a plurality of diced vertical structure light-emitting elements by dividing the silicon substrate in which each lamination part is arranged by plasma-etching the surface of the silicon substrate exposed between adjacent lamination parts. |
