| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for detecting whether a liquid material exists or not that can surely detect whether a liquid material stored in a liquid material storage container exists or not.SOLUTION: A method for detecting whether a liquid material exists or not comprises: when a liquid material A is supplied to a destination 11, a flow rate measuring process for continuously measuring a flow rate of the liquid flowing in a liquid material supply line 23 using a liquid flow rate meter 41; and, based on the flow rate of the liquid measured by the liquid flow rate meter 41, a process for detecting whether a liquid material exists or not that detects whether the liquid material A exists in a liquid material storage container 21 or not. |
