| 摘要 |
PROBLEM TO BE SOLVED: To provide a power supply device capable of stably controlling discharge vibration even when a stable control region of an ion accelerator is shifted with time.SOLUTION: A power supply device 100 controls an ion accelerator 10 which includes an anode electrode 12, a magnetic field generation part 11 arranged adjacent to the anode electrode for generating a magnetic field depending on a current, and a supply part 15 for supplying gas from an anode electrode side into a channel space 18 between the anode electrode and the magnetic field generation part. The ion accelerator causes electrons supplied into the channel space to act on the gas through the Hall effect to perform ion acceleration in the chanel space. The power supply device includes a control part for controlling a current to be supplied to the magnetic field generation part. The control part controls a current supplied to at least a part of the magnetic field generation part to have such a current waveform that an alternating current is superimposed on a direct current. |
