| 摘要 |
PURPOSE: A flexible thermoelectric element assembly united with a heat sink and a manufacturing method thereof are provided to obtain a high heat transfer effect by forming a metal thin plate on the upper part of a thermoelectric element. CONSTITUTION: A heat transfer material is deposited on a plating region (S17). A polymer layer is planarized (S19). A metal layer and a flat plate are removed (S21). An inner electrode is formed by depositing metal in order to connect the heat transfer material (S23). An insulating layer covering the inner electrode is formed (S25). The heat sink of a metal thin plate is formed on one surface of the insulating layer (S27). [Reference numerals] (S11) Metal layer depositing step; (S13) Metal etching step; (S15) Polymer layer forming step; (S17) Heat transfer material depositing step; (S19) Planarizing step; (S21) Removing step; (S23) Inner electrode forming step; (S25) Insulating layer forming step; (S27) Heat sink forming step |
