发明名称 DIODE MANUFACTURING METHOD AND DIODE
摘要 PROBLEM TO BE SOLVED: To eliminate a problem caused by a conventional technology.SOLUTION: In a manufacturing method of a diode 1 of forming on a semiconductor crystal plate 10, PN or NP junction parts smoothly extending across a surface 3 of the semiconductor crystal plate 10, and in the following process, cutting the semiconductor crystal plate 10 into individual diode chips 1 in which the cutting is performed such that cutting edges 6 extending over the PN or NP junction parts are formed perpendicular to the surface 3 of the semiconductor crystal plate 10, a fault part 11 is introduced into the semiconductor crystal plate 10 for the cutting, and local heating 12 and local cooling 13 of the semiconductor crystal plate 10 are performed beginning at the fault part 11 to extend a crack from the fault part 11 based on mechanical stress produced by the local heating 12 and the local cooling 13.
申请公布号 JP2014007405(A) 申请公布日期 2014.01.16
申请号 JP20130130546 申请日期 2013.06.21
申请人 ROBERT BOSCH GMBH 发明人 RICHARD SPITZ;ALFRED GERLACH;ROBERT KOLB
分类号 H01L21/301;H01L21/329;H01L29/861;H01L29/868 主分类号 H01L21/301
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