| 摘要 |
PROBLEM TO BE SOLVED: To accurately detect wind directions of air flows in a plurality of measurement regions on a surface of a sensor substrate even when a region in which the sensor can be arranged is limited on the substrate.SOLUTION: A data acquisition method for a substrate processing apparatus, includes: placing a sensor substrate on a placing part in a first direction and a second direction in order to acquire data on a wind direction in a first measurement region and a second measurement region on a surface of the substrate, respectively. (In the sensor substrate, a plurality of sensor pairs each having a first sensor and a second sensor for acquiring vector data on air flows are provided at distances different from each other when viewed from the center of the surface. The first measurement region and the second measurement region shift their positions to around the center of the substrate); and then combining the vector data on the air flows obtained by the first sensor and the second sensor forming the same sensor pair on the basis of a base point preset for each sensor pair, to calculate the wind direction from the respective base points in the first measurement region and the second measurement region. |
