发明名称 CHARGE QUANTITY MEASURING METHOD OF DISPERSED DROPLET, CHARGE QUANTITY MEASURING DEVISE THEREOF, AND CHARGE QUANTITY CONTROLLER THEREOF USING THE SAME METHOD AND DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a charge quantity controller of a dispersed droplet, which controls the quantity of a charge conveyed by droplets jetted out of an injection nozzle.SOLUTION: A charge quantity controller of a dispersed droplet includes: a metal injection nozzle; an insulating joint which is formed of an insulating material and which is connected between the nozzle and a pipe supplying a cleaning liquid to the nozzle; an electric wire stretched between the nozzle and the ground; an ammeter attached in the middle of the wire; and a carbon dioxide dissolving device which is attached in the middle of the pipe and which dissolves carbon dioxide in the cleaning liquid. The quantity of the carbon dioxide supplied to the carbon dioxide dissolving device is controlled on the basis of a current value of the ammeter.
申请公布号 JP2014006207(A) 申请公布日期 2014.01.16
申请号 JP20120143572 申请日期 2012.06.26
申请人 ASAHI SUNAC CORP 发明人 MURATA MASAMI
分类号 G01R29/24;B08B3/02;H01L21/304 主分类号 G01R29/24
代理机构 代理人
主权项
地址