| 摘要 |
A manufacturing method for a micromirror array according to the present invention includes: a step in which flat, transparent substrates are prepared; a step in which the substrates are placed in a dicing machine at a prescribed position of the processing stage thereof; and a step in which a plurality of parallel linear grooves are sequentially cut, at prescribed intervals, into one surface of each of the substrates by means of a rotating blade. The substrates that have the linear grooves cut into one surface (top surface) are then stacked in one of the following manners: (1) stacked so that the top surface of one substrate is facing the underside surface of the other substrate; (2) stacked so that the top surfaces of both substrates are facing each other; or (3) stacked so that the underside surfaces of both substrates are facing each other. The substrates are stacked so that, when viewed in planar view, the extension direction of the linear grooves in one substrate is orthogonal to the extension direction of the linear grooves in the other substrate. The method enables the low cost manufacture of optical elements and a micromirror array that are capable of forming a bright image exhibiting high luminance. |
