发明名称 Co/Ni Multilayers with Improved Out-of-Plane Anisotropy for Magnetic Device Applications
摘要 A MTJ for a spintronic device is disclosed and includes a thin seed layer that enhances perpendicular magnetic anisotropy (PMA) in an overlying laminated layer with a (Co/Ni)n composition or the like where n is from 2 to 30. The seed layer is preferably NiCr, NiFeCr, Hf, or a composite thereof with a thickness from 10 to 100 Angstroms. Furthermore, a magnetic layer such as CoFeB may be formed between the laminated layer and a tunnel barrier layer to serve as a transitional layer between a (111) laminate and (100) MgO tunnel barrier. There may be a Ta insertion layer between the CoFeB layer and laminated layer to promote (100) crystallization in the CoFeB layer. The laminated layer may be used as a reference layer, dipole layer, or free layer in a MTJ. Annealing between 300� C. and 400� C. may be used to further enhance PMA in the laminated layer.
申请公布号 US2014015079(A1) 申请公布日期 2014.01.16
申请号 US201314032593 申请日期 2013.09.20
申请人 JAN GUENOLE;KULA WITOLD;TONG RU YING;WANG YU JEN;MAGIC TECHNOLOGIES, INC. 发明人 JAN GUENOLE;KULA WITOLD;TONG RU YING;WANG YU JEN
分类号 H01L43/10 主分类号 H01L43/10
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