发明名称 ELECTRON MICROSCOPE
摘要 <p>An electron microscope is provided, which utilizes a polarized electron beam and can obtain an image with high contrast by recording an intensity distribution of an electron beam that transmitted through a sample. This electron microscope includes: a laser 2; a polarization apparatus 11 that polarizes a laser beam into a circularly polarized laser beam and that is capable of reversing the direction of the circular polarization over time; a semiconductor photocathode 16 that is provided with a strained superlattice semiconductor layer that generates a polarized electron beam when irradiated with the circularly polarized laser beam; a transmission electron microscope 24 that utilizes the polarized electron beam; an electron beam intensity distribution recording apparatus 34 that is arranged at a face reached by the polarized electron beam that has transmitted through a sample; a reversal instruction apparatus 40 that sends a signal to the polarization apparatus to reverse the direction of the circular polarization, and also sends in synchronization therewith a signal to the electron beam intensity distribution recording apparatus. The electron beam intensity distribution recording apparatus records an intensity distribution before and after the electron beam is reversed, and a difference acquisition apparatus 36 calculates a difference therebetween.</p>
申请公布号 EP2555222(A4) 申请公布日期 2014.01.15
申请号 EP20110762411 申请日期 2011.02.22
申请人 NATIONAL UNIVERSITY CORPORATION NAGOYA UNIVERSITY 发明人 TANAKA NOBUO;NAKANISHI TSUTOMU;TAKEDA YOSHIKAZU;ASANO HIDEFUMI;SAITOH KOH;UJIHARA TORU;KUWAHARA MAKOTO
分类号 H01J37/26;H01J1/34;H01J37/073 主分类号 H01J37/26
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