| 摘要 |
A composition including a polycrystalline metal nitride having a number of grains is provided. These grains have a columnar structure with one or more properties such as, an average grain size, a tilt angle, an impurity content, a porosity, a density, and an atomic fraction of the metal in the metal nitride. The metal nitride is made via a method comprising the steps of introducing at least a group III metal in a chamber, flowing a nitrogen-containing material and a hydrogen halide into the chamber, wherein the nitrogen-containing material reacts with the group III metal in the chamber to form the metal nitride. An apparatus for preparing a group III polycrystalline metal nitride is provided wherein group III metal is introduced into the chamber through a raw material inlet as a raw material feedstock. |
