| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a charged particle beam drawing apparatus capable of transferring drawn data efficiently to a deflection control means and surely preventing missing blocks in the drawn data in the deflection control means, and also to provide a method of transferring drawn data by the charged particle beam drawing apparatus. <P>SOLUTION: A data processing section 16 is equipped with a computation means 22 which performs computation processing on design block data and generates drawing block data; and multiple rearrangement means 24 and 26 which rearrange the drawing block data generated by the computation means 22 in order of drawing and transfers the rearranged drawing block data to a deflection control circuit 15. During transfer of the rearranged drawing block data from one rearrangement means 24 to the deflection control circuit 15, the other rearrangement means 26 is selected as an output destination of the drawing block data from the computation means 22 by means of a selection means 23. <P>COPYRIGHT: (C)2010,JPO&INPIT |
