| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a stage device having a non-contact bearing structure such that a movable frame neither easily change in a vertical direction nor easily deform. <P>SOLUTION: The stage device 2 includes a base plate 50 having a flat upper surface, and the movable frame 40 floating over the base plate 50. On a lower surface of the movable frame 40, a repulsive force portion 42 which generates repulsive force with the base plate 50 and a suction portion 46 which generates suction force with the base plate 50 are provided adjoining each other. The suction portion 46 decreases in suction force with the distance from the repulsive force portion 42. The repulsive force and suction force operate, so the movable frame 40 does not easily change in the vertical direction. The distance between the center of the suction force and the center of the repulsive force is small, so surface outward deformation of the movable frame which is caused by the repulsive force and suction force operating in mutually opposite directions is suppressed. <P>COPYRIGHT: (C)2011,JPO&INPIT |
