发明名称 |
Microcalorimetry for X-ray spectroscopy |
摘要 |
<p>An improved microcalorimeter-type energy dispersive x-ray spectrometer provides sufficient energy resolution and throughput for practical high spatial resolution x-ray mapping of a sample at low electron beam energies. When used with a dual beam system that provides the capability to etch a layer from the sample, the system can be used for three-dimensional x-ray mapping. A preferred system uses an x-ray optic having a wide-angle opening to increase the fraction of x-rays leaving the sample that impinge on the detector and multiple detectors to avoid pulse pile up.</p> |
申请公布号 |
EP2284524(B1) |
申请公布日期 |
2014.01.15 |
申请号 |
EP20100171817 |
申请日期 |
2010.08.04 |
申请人 |
FEI COMPANY |
发明人 |
TOTH, MILOS;SCHEINFEIN, MICHAEL;NARUM, DAVID;SILVER, ERIC |
分类号 |
G01N23/20;G01N23/225;H01J37/244;H01J37/256 |
主分类号 |
G01N23/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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