发明名称 Copper electroplating solution and method of copper electroplating
摘要 <p>A copper electroplating solution which contains ninhydrin and specific compounds containing sulfur atoms, with the structure -X-S-Y wherein X and Y are, independently atoms selected from a group consisting of hydrogen, carbon, sulfur, nitrogen, and oxygen, and X and Y can be the same only if they are carbon atoms and ninhydrin. By using this copper electroplating solution, it is possible to form good filled vias without worsening the appearance of the plating.</p>
申请公布号 EP2610370(B1) 申请公布日期 2014.01.15
申请号 EP20120199405 申请日期 2012.12.27
申请人 ROHM AND HAAS ELECTRONIC MATERIALS LLC 发明人 SAITO, MUTSUKO;SAKAI, MAKOTO;MORINAGA, TOSHIYUKI;HAYASHI, SHINJIRO
分类号 C25D3/38;H01L21/768 主分类号 C25D3/38
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