DRY ETCHING METHOD,申请号JP19920191076-传众专利搜索

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发明名称	DRY ETCHING METHOD
摘要
申请公布号	JPH0637058(A)	申请公布日期	1994.02.10
申请号	JP19920191076	申请日期	1992.07.17
申请人	TOSHIBA CORP	发明人	TOMIOKA KAZUHIRO;ITO YASUHIRO;HAYASHI HISATAKA
分类号	H01L21/302;H01L21/3065;(IPC1-7):H01L21/302	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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