发明名称 Multi-stage screw vacuum pump.
摘要 <p>A multi-stage screw vacuum pump having a reduced number of constituent parts as compared with the conventional one and a reduced overall size. The multi-stage screw vacuum pump comprises an input mechanism for transmitting a driving force derived from a driving source to a former-stage pump, and speed up mechanisms for speeding up the rotation of the former-stage pump for transmission to a latter-stage pump. &lt;IMAGE&gt;</p>
申请公布号 EP0582185(A1) 申请公布日期 1994.02.09
申请号 EP19930112014 申请日期 1993.07.27
申请人 EBARA CORPORATION 发明人 YANAGISAWA, KIYOSHI
分类号 F04C23/00;F04C25/02;F04C29/00;(IPC1-7):F04C29/00;F04C18/16 主分类号 F04C23/00
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